JPH017851Y2 - - Google Patents

Info

Publication number
JPH017851Y2
JPH017851Y2 JP1981106011U JP10601181U JPH017851Y2 JP H017851 Y2 JPH017851 Y2 JP H017851Y2 JP 1981106011 U JP1981106011 U JP 1981106011U JP 10601181 U JP10601181 U JP 10601181U JP H017851 Y2 JPH017851 Y2 JP H017851Y2
Authority
JP
Japan
Prior art keywords
seal
inner ring
gas
vacuum pressure
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981106011U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5811124U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10601181U priority Critical patent/JPS5811124U/ja
Publication of JPS5811124U publication Critical patent/JPS5811124U/ja
Application granted granted Critical
Publication of JPH017851Y2 publication Critical patent/JPH017851Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP10601181U 1981-07-15 1981-07-15 非接触シ−ル Granted JPS5811124U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10601181U JPS5811124U (ja) 1981-07-15 1981-07-15 非接触シ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10601181U JPS5811124U (ja) 1981-07-15 1981-07-15 非接触シ−ル

Publications (2)

Publication Number Publication Date
JPS5811124U JPS5811124U (ja) 1983-01-24
JPH017851Y2 true JPH017851Y2 (en]) 1989-03-02

Family

ID=29900521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10601181U Granted JPS5811124U (ja) 1981-07-15 1981-07-15 非接触シ−ル

Country Status (1)

Country Link
JP (1) JPS5811124U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5747460Y2 (en]) * 1976-05-21 1982-10-19

Also Published As

Publication number Publication date
JPS5811124U (ja) 1983-01-24

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